Flow Range:0–15 SLPM
Accuracy:±(1.5% of reading + 0.5% of full scale)
Repeatability:±0.5% of full scale
Flow Range:0 - 2000 sccm
Accuracy:±(2.0 + 0.5FS)%
Range Ratio:100:1
Measurement Range:0–2 SLPM (Standard Liter per Minute)
Accuracy:±(1.5% + 0.2% F.S.)
Repeatability:±0.25%
Measurement Range:0–50 SLPM
Accuracy:±(2.0% + 0.5% F.S.)
Repeatability:±0.75%
Measurement Range:0–500 SLPM
Accuracy:±1.5% of Full Scale (F.S.)
Repeatability:±0.75%
Measurement Range:0 - 800 SLPM
Accuracy Grade:1.5% F.S
Nominal Diameter:19mm
Potenza:11.4 ~ 25.2V
Allineare:0.5~10,1.8~32,5~85,9~150L/min
Accuratezza Intera gamma:X ± 1% ((< 50% di gamma)
Intervallo di flusso:0 ~ 2000... 6000
Precisione:±(2.0+0.5FS)%
Rapporto di riduzione:> 100:1
Per uso con:Gas secco
Allineare:+/- 200 cm/min
Precisione:0.35 %
Monitoring scope:500sccm
Accuracy:0.5%
Output voltage:4.5V
Deriva a zero dell'uscita:+30 mV
Drift di produzione:+0,12 %/°C
Fornitura di energia di lavoro:8-18 Vdc, 100mA
Percorso (N):2.3. 4. 5
Tasso di flusso:10, 20, 30, 40, 50 SLPM
Rapporto di autonomia:100:1